摘要
为了提高红外探测器的灵敏度,针对红外探测器元件滤光膜的技术要求,采用Si和YbF3的膜料组合,依据薄膜理论,设计干涉截止滤光膜,满足了3个波段对光学性能的要求,并且在实际制备过程中优化了工艺参数,包括温度、蒸发速率以及离子源辅助沉积参数。通过多次实验研究,对设备的本身误差进行分析修正,提高了膜层厚度控制精度,在蓝宝石基底上成功镀制了1 064 nm透射率为91.5%、1 200～2 900 nm平均反射率大于97%、3 000～5 000 nm平均透射率为93%的3波段干涉截止滤光膜,给出了综合测试结果和实测光谱曲线。
In order to improve the sensitivity of infrared detector, according to the technical requirements of the filter coating fixed on infrared detector components and using the thin-film material of Si and YbF3, the filter coating was designed on the base of film theory that met the demand of three regions of the spectrum. The technology parameters were optimized including temperature, evaporation rate and the parameter of ion assisted deposition technique. Through several experiments, the error was checked and the control accuracy of the film thickness was improved. The film filter whose transmissivity was 91.5% at 1 064 nm, the average reflectivity between 1 200 nm and 2 900 nm was above 97% and the average transmissivity between 3 000 nm and 5 000 nm was 95% were successfully manufactured. Finally, the measurement curves and test results were given.
出处
《红外与激光工程》
EI
CSCD
北大核心
2012年第11期2997-3002,共6页
Infrared and Laser Engineering
基金
省部产学研结合项目(2010A090200006)
关键词
滤光膜
真空度
温度
离子辅助沉积
filter film
vacuum degree
temperature
ion assisted deposition
