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微机电系统磁场传感器信号处理电路 被引量:1

Signal Processing Circuit of MEMS Magnetic Field Sensor
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摘要 介绍了一种微机电系统(Micro-electro-mechanical system,MEMS)磁场传感器微弱信号处理电路的设计,该处理电路是MEMS磁场传感器的重要组成部分,该电路由放大电路和滤波电路构成。对设计的处理电路进行模拟分析和实验测试,处理电路性能良好。外接MEMS磁场传感器后对传感器性能进行测试,传感器的电流-电压特性以及磁场-电压特性符合最初的设计要求,灵敏度可以达到14mV/mT。实验表明该电路对输出信号进行了放大,并有效地抑制了噪声,且有良好的灵敏度。 A design of a micro-electro-mechanical system(MEMS) weak signal processing circuit of mag- netic field sensor is described. The processing circuit is an important part of the magnetic field sensor, including an amplifier circuit and a filter circuit. The performance is good in line with the original design requirements through circuit analysis and experimental testing. The current-voltage characteristics and the magnetic field-voltage characteristics of the sensor are verified by experiment with the sensitivity of 14 mV/mT. The experiments show that the signal is effectively amplified, the noise is suppressed and the circuit has good sensitivity.
作者 陈洁 秦明
出处 《南京航空航天大学学报》 EI CAS CSCD 北大核心 2012年第6期835-839,共5页 Journal of Nanjing University of Aeronautics & Astronautics
基金 国家自然科学基金(61201032)资助项目
关键词 放大电路 滤波电路 感生电动势 磁场 amplifier circuit filter circuit induced electro motive force magnetic field
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参考文献14

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二级参考文献12

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