摘要
结合机械故障信息监测的需求,将微机电系统(micro electro-mechanical system,简称MEMS)传感器技术引入到机械装备的振动测量中,介绍了压阻式MEMS加速度传感器的检测原理、结构设计、微加工工艺及其关键技术。以"小变形-大应力"为敏感结构设计思路,研制了梁膜结构、孔缝双桥结构以及复合多梁结构3种高频加速度传感器,以满足高速制造装备的振动信号监测对传感器的需求。通过静态、动态性能测试实验可以看出,3种结构均在一定程度上提升了传感器的测量性能,实际测振实验也说明所研制的MEMS加速度传感器具备了装备振动信号检测所需的功能。具有微型化、低成本以及可大规模生产潜力的MEMS传感器的发展为高端机械制造装备的发展提供了新的器件支持,推动主轴部件等的智能化、一体化发展。
Concerning the requirements of mechanical fault monitoring,the MEMS sensor technology is incorporated into the vibration detection in manufacturing equipment.The detailed parameters of MEMS piezoresistive accelerometers are introduced,including sensing mechanism,structural design,micromachining process and key techniques.Using the proposal of large stress under little deformation,the cantilever-membrane structure,quad-slots-beam structure and multi-beam structure are proposed for high-performance accelerometers.The novel structures give an available solution to the trade-off between the measurement sensitivity and resonant frequency and obviously enhance the sensor characteristics.The results of sensor characterization and vibration detection show that the developed sensors can be used in the fault monitoring in manufacturing equipment.The MEMS sensors,featuring the potential for low cost and miniaturization,are promising to be the new sensing devices for advanced manufacturing equipment.
出处
《振动．测试与诊断》
EI
CSCD
北大核心
2012年第6期875-882,1031,共8页
Journal of Vibration,Measurement & Diagnosis
基金
国家自然科学基金资助项目(编号:51275402)
国家重点基础研究发展计划("九七三"计划)资助项目(编号:2009CB724405)
长江学者和创新团队发展计划资助项目(编号:IRT1033)
关键词
故障监测
微机电系统
加速度传感器
敏感结构
微加工
fault monitoring,micro electro-mechanical system(MEMS),accelerometers,sensing elements,micromachining
