摘要
针对工业控制系统中常用的硅基压力传感器,介绍了可靠性试验分类,可靠性试验应力类型。通过常规试验方法产生的失效模式、失效模式比例,进行进一步的失效机理分析,找出硅基压力传感器设计缺陷及薄弱环节,提出其可靠性强化振动试验方法的理论基础和试验应用模型,并对典型试验方法进行了剖析,并基于试验结果提出了硅基传感器具体设计改进建议。
This article is in allusion to the silicon pressure sensors used in industrial control systems, to introduce the classifi- cation of reliability test and force types of reliability. Depend on the failure modes and failure modes proportion which create by conventional test methods, further analyse their failure mechanisms, identify the design defects and the weakness of silicon pressure sensor, to table a proposal of the theoretical basis and test application model of reliability enhancement vibration test method, and analyse the typical test methods, and give the specific design improvement suggestions for silicon pressure sensor which base on the experimental results.
出处
《仪表技术与传感器》
CSCD
北大核心
2012年第12期113-115,共3页
Instrument Technique and Sensor
关键词
传感器
可靠性
振动试验
sensor
reliability
vibration test
