摘要
随着MEMS技术、集成电路技术和材料制备与特性研究工作的进展,必将使得MEMS压力传感器的批量生产、在弹药中的大量应用成为可能。系统地分析MEMS压力传感器的特点、分类及国内外发展现状,包括研究现状、产品现状和MEMS压力传感器在弹药中的应用,对相关的科学研究具有重要意义。
With the progress of research on technology of MEMS,integrated circuit（IC） and material preparation and characteristic study,MEMS pressure sensor will be batch produced and be used in projectile on a large scale.It has important significance for correlation scientific study to systematically analyze the characteristic,class and development status both at home and abroad of MEMS pressure sensor and applications in projectile.
出处
《传感器与微系统》
CSCD
北大核心
2013年第2期4-7,共4页
Transducer and Microsystem Technologies
