摘要
介绍了计算机模拟技术在微传感器和微执行器设计中的应用 ,通过对多晶硅压力传感器和微泵膜片的计算机模拟分析 ,优化了器件的结构设计。
: The application of computer simulation for microsensor and microactuator design is presented. The designs of polysilicon pressure sensors and micropump membranes were optimized by computer simulation and ana- lysis. It is shown that computer simulation is the effective tool of microsensor and microactuator designs.
出处
《传感器技术》
CSCD
2000年第3期18-20,共3页
Journal of Transducer Technology
