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Roll-to-roll imprint for high precision grating manufacturing 被引量：3

Roll-to-roll imprint for high precision grating manufacturing
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摘要 In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of imprint roller and backup roller,and also the imprint pressure,are investigated. Various gratings with different periods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint,a calibration system is built with a dual-frequency laser interferometer. By the calibration,the self-made gratings can achieve ±4μm accuracy in 45mm measuring distance.
作者 Liu Hongzhong Shi Yongsheng Yin Lei Jiang Weitao Lu Bingheng
机构地区 School of Mechanical Engineering State Key Laboratory for Manufacturing Systems Engineering
出处 《Engineering Sciences》 EI 2013年第1期39-43,共5页 中国工程科学（英文版）
基金 The Major Special Projects of Ministry of Science and Technology of China(No.2011ZX04014-071) National Natural Science Foundation of China(No.51275400)
关键词 high-precision gratings roll-to-roll imprint MISALIGNMENT roller mold 光栅 印记 制造 高精密 校准测量能力 消耗臭氧层物质 双频激光干涉仪 校准系统
分类号 TP335.1 [自动化与计算机技术—计算机系统结构] TN949.7 [电子电信—信号与信息处理]
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参考文献9

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同被引文献20

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Engineering Sciences
2013年 第1期

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