摘要
采用Ti/Mo复合靶 ,用多弧离子镀技术沉积了 (Ti,Mo) xN多元涂层 ,研究了Mo对该涂层组织与性能的影响。结果表明 ,涂层的主要结构为 (Ti,Mo) 2 N ,其中Mo的固溶度可达 4 56% (质量分数 ) ,并具有较高的显微硬度、抗氧化性和低的孔隙率。在沉积过程中存在着多元合金涂层与复合靶的成分离析现象 ,这与靶材的结构有关。
Z](Ti,Mo) xN coatings were deposited by multi-arc ion plating using the Ti/Mo composite cathode target.The microstructure and properties of the coatings were studied.The results showed that the coatings consisted of (Ti,Mo) 2N mainly,which solubility of Mo reached to 4.56%(wt),with high micro-hardness and oxidation resistance and low porosity.The composition demixing phenomena of the coatings and composite target were analyzed.
出处
《金属热处理》
EI
CAS
CSCD
北大核心
2000年第8期7-9,12,共4页
Heat Treatment of Metals
关键词
多弧离子镀
组织
性能
成分离析
氮化钛
氮化钼
multi-arc ion plating
(Ti,Mo) xN coating
microstructure and properties
composition demixing
