摘要
包材的性能是制约IC产线电子化学品品质的关键因素之一。盐酸是IC制造的基础电子化学品之一,其具有极其强的络合性能和渗透性。因而对比于其他电子化学品而言,其包材的要求更高。研究了IC制备用超纯盐酸包材HDPE的性能,包括颗粒溶出、金属溶出、外观稳定性。重点研究了盐酸在该HDPE中的渗透性能:渗透的方式、渗透速度、渗透条件等。并进一步总结评估这些关键参数对超纯电子化学品性能及存储条件的影响。
The property of package material is one of the most important factors for the IC line electronic chemical quality.The hydrochloric acid is one of basic electronic chemicals,which with extremely high complexation property and permeability property.So compare to other electronic chemicals,its package material request is extremely strict.In this work,the properties of the HDPE which used for IC usage ultra-pure hydrochloric acid package was studied.Many factors were consideredd such as grain dissolving,ion dissolving,appearance stability,especial to the permeability properties: such as the permeability style,permeability speed,permeability condition etc.The effects of these key parameters on the chemical properties and storage condition have been summaried and evaluated.
出处
《化学试剂》
CAS
CSCD
北大核心
2013年第2期189-192,共4页
Chemical Reagents
关键词
高密度聚乙烯
超纯电子化学品
盐酸
渗透
HDPE
ultra-pure electronics chemical
hydrochloric acid
permeability
