摘要
为解决高精度氮化硅陶瓷球批量研磨加工的问题,将超精密研磨技术应用到氮化硅陶瓷球的加工实验中。开展了研磨过程的分析,建立了不同研磨阶段陶瓷球球度、表面质量及材料去除率与所选不同大小粒度磨料之间的关系,并提出了对比分析的方法,在通过专业设备检测的基础上对成品球球度、表面粗糙度和振动值进行了评价。研究结果表明,氮化硅陶瓷球能够批量生产且球度达到0.062μm以下,表面粗糙度达到1.48 nm以下,振动值达到24 dB以下,实现了批量生产G3级氮化硅陶瓷球的目的。
In order to solve the problems of the lapping process for the precision Si3N4 bali in mass production, the ultra-precision lapping technology in the lapping process for Si3N4 ball was investigated. The lapping process was analyzed. The relationship between the sphericity, surface quality, material removal rate and the different abrasives in different lapping stages was established. A method was presented to comparative analysis. The surface quality was evaluated on the Si3N4 ball. The sphericity, surface roughness and vibration value of the finished Si3N, balls were tested. The experimental results indicate that sphericity, surface roughness and vibration value are lower than 0.062 I.tm, 1.48 nm and 24 dB respectively. The Si3N, bails at the G3 level in mass production are obtained.
出处
《机电工程》
CAS
2013年第2期171-174,213,共5页
Journal of Mechanical & Electrical Engineering
基金
江苏省科技支撑计划资助项目(BE2011063)
常州市科技局资助项目(CJ20115005)
关键词
氮化硅
陶瓷球
高精度
表面粗糙度
球度
研磨工艺
silicon nitride（Si3N4）
ceramic ball
surface roughness
sphericity
lapping process
