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多晶硅铸锭用石英坩埚氮化硅涂层免烧结工艺研究

Preparation of Si3N4Coating in Quartz Crucible Used for Multicrystalline Silicon Ingot by Non-sintered Process
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摘要 研究了石英坩埚氮化硅涂层免烧结工艺。在氮化硅浆料中加入一定量固体和液体粘结剂,使氮化硅粉强有力地吸附在坩埚内壁,喷涂完成后在70~80℃保温2h直接装入硅料,免去了传统涂层制备工艺中坩埚需在1050℃温度下烧结6~7h的工艺过程。此工艺可缩短晶锭的生产周期,提高生产效率,降低生产成本。 Preparation of Si3N4 coating in quartz crucible was conducted by non-sintered process. By adding some solid and liquid binders in the Si3N4 slurry, Si3 N4 powders were adhered strongly with the crucible inter-wall. By putting the silicon material into the crucible directly after spraying process and holding at 70~80 ℃ for 2 hours, the traditional process of crucible sintered at 1 050 ℃ for 6~7 hours in the sintering furnace can be eliminated, and so the production cycle can be shortened, improving effi- ciency and decreasing production cost.
出处 《特种铸造及有色合金》 CAS CSCD 北大核心 2013年第2期116-118,共3页 Special Casting & Nonferrous Alloys
关键词 氮化硅涂层 烧结工艺 坩埚 石英 多晶硅 铸锭 氮化硅粉 工艺过程 Multicrystalline Silicon, Un-sintering,Si3 N4 Coating, Binder
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