摘要
基于齿轮齿面的特殊性和激光干涉系统设计理论,以系统易实现、且能获得良好的干涉条纹图像为具体设计目标,提出了斜入射式的激光干涉测量系统结构方案。介绍了光学测量系统的结构、原理,阐述了基于光线追迹的光学系统计算仿真方法,给出了分别以平面、渐开线直齿轮齿面和渐开线斜齿轮齿面作为被测对象时的干涉条纹图像的仿真结果。
Based on the characteristic of gear tooth surface and the design theory of laser interferometry system, with the easy-realized and acquiring excellent interference fringe patterns as the aim, this paper proposes the inclined-incidence laser interferometry system, introducing the structure and principle of the optical system, explaining the simulation method, based on ray-tracing methods, of the optical system, thus showing the simulated interference fringe results.
出处
《东莞理工学院学报》
2013年第1期79-82,共4页
Journal of Dongguan University of Technology
关键词
光学系统设计仿真
激光干涉
形状误差
齿面
optical system design and simulation
laser interferometry
shape error
tooth surface
