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热处理对制备辉光放电聚合物薄膜结构及光学性能的影响 被引量:5

Influnce of heat treatment on the structure and optical properties of glow discharge polymer films
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摘要 利用低压等离子体聚合技术制备了约5μm的辉光放电聚合物薄膜,将所制备的样品放入热处理炉中通入氩气保护,分别在280℃,300℃,320℃,340℃进行热处理.对热处理后的样品采用傅里叶变换红外吸收光谱(FT-IR)分析了不同热处理温度对薄膜结构的影响.对CH振动区进行了分峰高斯拟合,定量的分析了个官能团的变化.利用紫外可见光谱仪分析了热处理前后薄膜在紫外—可见光区域内光学透过率及光学带隙的变化.结果表明:随着热处理温度的升高,薄膜中H含量减少,薄膜中甲基相对含量减少,而双键、芳香环结构相对含量增加,在600nm以后的可见光区,薄膜的透过率减小.薄膜光透过率的截止波长红移,光学带隙减小. The glow discharge polymer (GDP) films each with a thickness of about 5 μm are deposited by low-pressure plasma polymer apparatus. The GDP films are heat-treated at different tempertures of 280, 300, 320 and 340℃ in Ar atmosphere. The influence of heat treatment on the structure of GDP film is characterized by FT-IR. The optical transparency and optical band of GDP film are investigated by UV-VIS spectrum. The results show that with temperature increasing, the relative content of CH3 decreases, while the relative content values of CH2 and CH increase. The H content in GDP film decreases. The optical band gap decreases, and the transmittance in a range of more than 600nm decreases too.
出处 《物理学报》 SCIE EI CAS CSCD 北大核心 2013年第5期343-348,共6页 Acta Physica Sinica
关键词 热处理 薄膜结构 等离子体聚合 光学性能 heat treatment, structure, plasma polymer, optical property
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