摘要
分析了目前微惯性开关中3种闭锁机构的基本工作原理。利用力学能量方法对L型闭锁机构的闭锁梁在主电极惯性力作用下的打开状态与闭锁状态的位移比,以及闭锁梁的动态位移进行了理论推导,进一步完善了此类闭锁机构的数学模型。在闭锁梁理论公式的推导过程中,利用ANSYS仿真软件对理论公式进行验证,并明确了理论公式的适用条件。分析结果表明,仿真值与理论值之间的相对误差小于5%,证明了理论公式的准确性。为提高L型闭锁梁的闭锁稳定性,分析主要结构参数对闭锁梁结构稳定性的影响,所得结果为L型闭锁机构的设计提供了重要的理论依据。
The basic working principles of three types of latching structures in current micro inertial switches were analyzed.Therefore,the latching beam displacement ratio of the opening and latching states,and the theoretical formula of the beam dynamic displacement for the L-shaped latching beam under the inertial force of the main electrode were deduced theoretically with the mechanical energy method.Further the mathematical model of the L-shaped latching structure was improved.During the derivation of the latching beam theory formula,the theoretical formula was verified with the ANSYS simulation software,and the applicable conditions of the theoretical formula were expressed clearly.The analysis results show that the relative error is less than 5% between the simulation and theoretical values,proving the precision of the theoretical formula.In order to improve the stability of the latching beams,the effect of the main structure parameters on the stability of the latching beam structure was analyzed.The obtained results provide an important theoretical basis for the overall design of the L-shaped latching structure.
出处
《微纳电子技术》
CAS
北大核心
2013年第3期172-176,183,共6页
Micronanoelectronic Technology
关键词
微惯性开关
L型闭锁梁
位移比
动态响应
结构稳定性
micro inertial switch
L-shaped latching beam
displacement ratio
dynamic response
structure stability
