摘要
介绍了锁相倍频式光栅检测系统的工作原理及硬件组成。该系统采用锁相倍频式细分方法 ,具有较高的测量精度。
s:The principle and hardware design of phase- locked multi- frequency grating detecting system is introduced in this paper.The phase- locked multi- frequency division theory is used in this system and higher measuring accuracy is achieved. Atthe end of the paper,the grating digital readoutis given as an example of this system.
出处
《制造技术与机床》
CSCD
北大核心
2000年第11期32-34,共3页
Manufacturing Technology & Machine Tool
关键词
光栅检测系统
锁相倍频
细分
位移传感器
Grating Detect,Phase- locked Multi- frequency, Division Application and Experiment of Neuron Networks in Manufac- turing System Monitoring FEI Renyuan,et al 40 Abstracts:The application of Neuron Network Techniques NNT in manufacturing
