摘要
用酒精和氢气的混合气体为工作气体 ,在不同的酒精浓度下 (1 0 % ,1 5% ,2 0 % )下利用微波等离子体化学气相沉积法在较低温度下 (450～ 50 0℃ )以单晶硅为衬底制备出类金刚石薄膜样品。 Raman光谱分析了酒精浓度对薄膜中金刚石成份的含量的影响。红外光谱分析表明薄膜的红外光透过率与薄膜的表面形貌、薄膜结构有关。酒精浓度为 1 0 %时得到的金刚石薄膜的红外光透过率最高 ,达到 62～ 72 % ,同时透过率曲线因薄膜干涉而引起的振荡也最为显著。
Diamond like carbon film were prepared on a microwave plasma assisted chemical vapor deposition apparatus from ethanol hydrogen gas mixture under lower temperature (450～500℃).The concentration of ethanol was set at 10%,15%,20%,respectively.The content of diamond in film was influenced by [WT5”,6BZ]the ethanol concentration and anayzed with Raman spectroscopy.The transmittance of infrared light varied with themorphology and the structure of the films.The transmittance reached at 62～72% and the interference fringes over the spectral range 4000～400cm -1 become evident when the ethanol concentration was set at 10%.
出处
《真空电子技术》
2000年第5期1-4,共4页
Vacuum Electronics
