摘要
为了设计高灵敏度的谐振式加速度计,从能量耗散的角度对其进行了力学建模分析,通过理论分析和实验仿真说明:传感器参数的选择对系统能量耗散会产生极大的影响。实验证明:当外部结构刚度远远大于内部结构刚度时,可以实现加速度计外部结构和内部结构的解耦。这为设计高Q值、高灵敏度的谐振式加速度计提供了理论基础。
In order to design high sensitivity resonant accelerometer,mechanical modeling and analysis are carried out in view of energy dissipation.Theoretical analysis and simulation results show that choise of sensor parameters can greatly influence system energy dissipation.Experiment shows that when stiffness of external structure is much larger than that of internal structure,decoupling can be realized in these two parts.It provides theoretical basis for design of high Q factor and high sensitivity resonant accelerometer.
出处
《传感器与微系统》
CSCD
北大核心
2013年第6期33-35,46,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(60927005)
关键词
谐振式加速度计
能量耗散
Q值
resonant accelerometer
energy dissipation
Q factor
