摘要
为了测量光学玻璃的全场应力延迟量,提出了一种基于移相算法和自准直光路系统的应力测量方案。测试光两次通过被测件使应力信息放大1倍。根据应力条纹图对比度选定移相步长,分析一组具有高对比度的移相应力条纹图实现方砖延迟量的全场分布测量。通过仿真得到该方法的测量精度达0.2nm/cm,测量结果显示退火方砖的中间区域应力延迟量为3nm/cm,边沿区域为9nm/cm。采用该方法,可以快速实现应力延迟量的全场高精度测量。
In order to determine the stress retardation distribution of optical glass, a novel method based on phase shifting algorithm and autocollimation method is proposed. An enlargement of the retardation of specimen can be achieved because of the autocollimation architecture. The phase shift step is fixed on according to the contrast of stress fringe patterns. The stress retardation can be acquired by analyzing a set of phase shifting stress fringe patterns with high contrast. The simulated result shows an accuracy of 0.2 nm/cm. The experimental result indicates that the retardation in the central area of annealed glass cube is 3 nm/cm while in the edge area it is 9 nm/cm. Fast stress retardation measurement with high precision can be realized by this method.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2013年第6期117-121,共5页
Acta Optica Sinica
基金
国家自然科学基金(61108041
U1231111)资助课题
关键词
测量
光学测量
应力延迟量
移相算法
光学玻璃
measurement
optical testing
stress retardation distribution
phase shifting algorithm
optical glass
