摘要
主要介绍了冷阴极电离真空计结构、工作原理及冷阴极电离真空计的校准方法和校准装置,并对校准数据进行了处理。由于冷阴极电离真空计为非线性真空计,通过比较,校准结果采用了校准曲线的方式,可提高校准的准确度,减小校准不确定度,保证真空测量的可靠性。
This paper mainly introduces the structure, principle, calibration method and apparatus of cold cathode ionization vacuum gauges. The calibration data are processed. The calibration results are displayed by means of the calibration curve as the cold cathode ionization vacuum gauge is nonlinear. This method can improve calibration accuracy, reduce measurement uncertainty and ensure reliability of vacuum measurement.
出处
《计测技术》
2013年第3期51-53,共3页
Metrology & Measurement Technology
关键词
冷阴极电离真空计
校准方法
校准装置
不确定度
校准曲线
cold cathode ionization vacuum gauge
calibration method
calibration apparatus
measurement uncertainty
calibration curve
