摘要
聚合物太阳电池的制备中,阳极ITO的制备是决定器件效率的重要工艺之一。本文主要对ITO电极的湿膜光刻和干膜光刻制备方法进行了比较,并用光学相干断层扫描(OCT)技术等方法对制备的电极进行了检测,结果表明湿膜光刻可以获得较为精细的电极结构。
The fabricaton of ITO electrode is one of the important processes,to determine the efficiency of devices in the fabrication of PSCs. This paper focuses on comparing wet film with dry film methods of ITO electrode. Optical Coherence Tomography (OCT) technique and other methods were used for the observation of the electrodes. The results show that the wet lithography obtains more fine electrode structure.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2013年第6期1143-1147,共5页
Journal of Synthetic Crystals
关键词
湿膜光刻
干膜光刻
OCT
ITO电极
wet film photolithography
dry film photolithography
OCT
ITO electrode
