摘要
压电驱动微位移工作台的动态特性分析对其设计及实际应用都有很大的指导作用。本文在线性化的前提下 ,通过对这种微位移工作台各个组成部分的相应简化 ,分析了在频响低于共振频率时微位移工作台的动态特性 ,得出了其传递函数。另外 ,本文还对影响工作台设计的两个重要边界条件 -初始预紧力和工作台所能达到的最大频响进行了比较详细的推导 。
The dynamic characteristic analysis of the micropositioning system driven by the PZT actuator is very important to design and application. By simplifying parts of the micropositioning system based on linearization, this paper analyzes the dynamic characteristics of the system working below resonance frequency, and its transfer function. Meanwhile, two boundary conditions - the maximum frequency response and preload that should be fed are analyzed.
出处
《光学精密工程》
EI
CAS
CSCD
2000年第5期440-443,共4页
Optics and Precision Engineering
关键词
压电陶瓷
微位移工作台
动态特性分析
PZT actuator
micropositioning system
dynamic characteristic analysis
