摘要
选用纯Ti靶与Ti0.33Al0.67合金靶制备Ti0.33Al0.67N膜层,在对基体材料进行离子渗氮之后,采用正交试验对多弧离子镀中的工艺参数进行优化,通过观察膜层结合力、表面形貌、显微硬度和膜层厚度选择最佳的工艺参数。
Ti0.33Al0.67N film was prepared using pure Ti target and Ti0.33Al0.67 alloy as target. After ion nitriding of matrix material, ulti-arc ion plating process parameters were optimized by orthogonal test. The optimal process parameters were selected by observing the surface morphology, microhardness and film thickness of the coating.
出处
《热加工工艺》
CSCD
北大核心
2013年第14期113-114,119,共3页
Hot Working Technology
基金
江苏省海洋资源开发研究院2011年度开放基金资助项目(JSIMR11C27)
