摘要
氧化铝薄膜因对晶体硅材料具有理想的钝化效果,在晶体硅太阳电池领域被认作是一种优良的减反射材料。概述了氧化铝薄膜的钝化特性,主要制备方法等研究现状。分析认为:磁控溅射法具有成膜均匀性好、质量高、沉积速率快、成本低、易控制等诸多优势,因此该方法在太阳电池的工业化领域具有广阔的应用前景。
Aluminum oxide films was considered as an good anti-reflection materials in the application of solar cells,because of its excellent passivation effect on crystal silicon materials.The present research situation of passivation characteristic and preparation were introduced in this paper.The results showed that magnetron sputtering methods has favourable development prospects,because of deposition uniformity,high quality,fast deposition rate,low cost and easy control,which may be put into practical applications for the industrial production of solar cells.
出处
《云南师范大学学报（自然科学版）》
2013年第2期20-24,共5页
Journal of Yunnan Normal University:Natural Sciences Edition
关键词
氧化铝薄膜
钝化
减反射
制备方法
太阳电池
Aluminum oxide films
Passivation
Anti-reflection
Preparation method
Solar cell
