摘要
微型星用热开关辐射器因其辐射能力可根据需要主动调节,整体采用薄膜和微结构制造,具有轻小、低功耗等的特点,非常适合于微/纳卫星热控应用。国外同类器件主要采用硅工艺制作,由于材料和工艺限制,器件热性能较差。本文提出了一种基于激光微加工技术,采用聚酰亚胺作为结构材料的微型星用热开关辐射器,介绍了器件的工作原理,对器件结构和热性能进行了理论分析,确定了影响器件性能的主要因素。然后采用紫外激光微加工、浸渍提拉法和磁控溅射薄膜沉积等技术制作了微型热开关辐射器样件,并进行了驱动电压和性能测试。测试结果表明,样件驱动电压为97 V,辐射功率调节量约为0.1W。最后对测试结果进行了分析和讨论,提出了改进方案。
A novel type of micro variable radiator was developed for the thermal control of micro/nano satellites to improve the poor thermal performance of the conventional micro variable radiator fabricated with silicon material by conventional processing technology.The newly-developed micro variable radiator with small size,light weight and low power consumption,was fabricated by thin film and laser micro-processing technologies with polyimide film as the thermal insulation material.The impacts of the various factors,including the emission characteristics of gold film,thickness of polyimide film,structures,and processing techniques,on the thermal performance were experimentally and theoretically evaluated.A prototyped micro variable radiator,fabricated by a combination of ultraviolet laser micro-processing,dip-coating,and magnetron sputtering,was tested.The test results show that the prototyped micro variable radiator has an actuation voltage of 97 V and a variation in radiation power of 0.1 W.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2013年第8期751-754,共4页
Chinese Journal of Vacuum Science and Technology
关键词
热控制
可变辐射器
微加工
微
纳卫星
Thermal control
Micro-variable radiator
Micro-processing
Micro/nano-satellite
