摘要
利用金属离子注入技术,将Zn离子注入到硅基上形成一种Zn原子纳米颗粒复合材料.基于太赫兹时域光谱系统,研究该纳米颗粒复合材料在太赫兹波段的传输特性.结果表明,与硅片相比,随着Zn离子注入剂量的增加,太赫兹时域光谱中峰值位置从8 ps分别偏移至7.90、7.98与7.96 ps.通过傅里叶变换,表明Zn离子注入后某些频率处会出现透射增强.
By using metal ion implantation technology, Zn ions were implanted into Si surface to form a kind of Zn atom nanoparticle composite. Based on terahertz time-domain spectrum system, the transmission property of the nanoparticle composite was studied at the terahertz wave band. The results show that compared with that of Si, the peak position of the nanoparticle composite in the spectra is shifted from 8 ps to 7.90 ps, 7.98 ps and 7.96 ps with an increase in metal ion implant dose. After the Fourier transform, the transmission-enhanced phenomenon was also observed at some frequency.
出处
《深圳大学学报(理工版)》
EI
CAS
北大核心
2013年第5期514-517,共4页
Journal of Shenzhen University(Science and Engineering)
基金
国家自然科学基金资助项目(61078018)
教育部高校博士点专项基金资助项目(20104408120002)~~
关键词
金属纳米颗粒
太赫兹波
功能器件
太赫兹增强效应
金属离子注入
多重散射
metal nanoparticles
terahertz wave
functional device
terahertz-enhanced effect
metal ion implan-tation
multiple scattering