摘要
分析了静电探针的工作原理 ,探讨了静电探针获得等离子体的伏安特性曲线的测量技术 ,获得了等离子体的电子温度、密度、空间电位和悬浮电位等重要特性参数。
In this paper, the working principle of a langmuir probe and its measurement technique applied in the plasma volt ampere characteristic curve are discussed. Thus, the important characteristic parameters, such as the electronic temperature,density and location,have been obtained by using the langmuir probe.
出处
《佛山科学技术学院学报（自然科学版）》
CAS
2000年第3期11-15,共5页
Journal of Foshan University(Natural Science Edition)
基金
国家重大自然科学基金项目! ( 694 9350 0 )
关键词
静电探针
等离子体特性参数
测量技术
特性曲线
langmuir probe
volt ampere characteristic curve
plasma characteristic parameters
