摘要
磁场对于半导体晶体生长过程中的熔体流动模式有着明显的影响 ,因而可以改善晶体的组分和杂质的分布。在半导体单晶生长过程当中利用超导磁场来抑制熔体的对流 ,采用这种方式既可以生长出优质的单晶又可以研究熔体的对流与扩散对生长半导体单晶的质量影响。本文报道了新近自行设计、制造的一种新型超导磁场直拉单晶炉。
Because it can affect the mode of fluid in the process of growing semiconductors, the magnetic field can improve the distribution of composite and impurities in the crystal. The convection in the melt can be restrained by applying supermagnetic field while growing semiconductors. High quality semiconductors can be grown with such technique. The effects of convection and diffusion on the quality of semiconductors can also be investigated with this technique. A newly designed and fabricated supermagnet puller has been reported in this paper.
出处
《功能材料与器件学报》
CAS
CSCD
2000年第4期453-456,共4页
Journal of Functional Materials and Devices
基金
国家科技部资助攀-95-预 - 34部分
