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溶胶-凝胶法制备K-N共掺ZnO薄膜的结构及光学特性 被引量:6

Structural and optical properties of K-N co-doped ZnO films prepared by sol-gel method
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摘要 采用溶胶-凝胶法在Si(100)衬底上生长了K与N共掺的ZnO薄膜,并用X射线衍射仪、扫描电子显微镜、荧光分光光度计、紫外-可见分光光度计对ZnO薄膜样品的结构和光学特性进行了研究。结果表明,溶胶-凝胶法制备的ZnO薄膜为六方纤锌矿结构。随着K掺杂浓度的增大,薄膜的结晶性变好,组成薄膜的颗粒变大,并表现出c轴择优生长特性,同时掺杂导致的氧空位缺陷也在增加,使得绿光发射增强,薄膜的光学带隙先增后减。 The K-N co-doped ZnO films were prepared on Si(100)substrates by sol-gel method.The structure and the optical properties of the ZnO films were investigated by X-ray diffraction,scanning electron microsco-py,photoluminescence and ultraviolet and visible spectrophotometer.The results show that the films exhibit a hexagonal structure.As the concentration of potassium increases,the crystallinity of the films was improved and the grain size increases,showing a preferential growth along c axis.Meanwhile,the increased concentration of K-N doping results in increased oxygen vacancies,enhanced green photoluminescence,and the optical band-gap that increases first and then decreases.
出处 《功能材料》 EI CAS CSCD 北大核心 2013年第22期3301-3304,共4页 Journal of Functional Materials
基金 甘肃省自然科学基金资助项目(1107RJYA280 1208RJYA021)
关键词 ZNO薄膜 K—N共掺杂 光学带隙 光致发 光谱 溶胶-凝胶法 ZnO film K-N co-doping optical band-gap photoluminescence sol-gel method
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