摘要
简述了研究膜层光学薄膜参数测量方法的必要性。详细介绍了各种测量方法的理论思想、测量准确度、测量范围。综合比较了各种测量方法的优缺点和适用性,研究了测量不同类型薄膜系统膜层光学薄膜参数的最佳测量方法。最后总结了膜层光学薄膜参数测量方法的发展,并提出了建议。
Necessity of method used in measuring optical film parameters was overviewed . Several measuring methods were introduced in detail with their theory, measuring accuracy and range analyzed. Advantages and disadvantages of various meth- ods were contrasted. The scopes of different methods were considered. It got the best measuring method for the different types of optical film. Finally, development of those methods was summarized. The suggestions were put forward.
出处
《真空与低温》
2013年第4期224-227,共4页
Vacuum and Cryogenics
关键词
光学薄膜参数
包络线法
全光谱拟合反演法
optical film parameters
envelope method
full spectrum fitting inversion method
