摘要
针对表面改性SiC基底反射镜在空间光学系统中的应用,总结了该类反射镜在国内外的研究现状。概括了碳化硅基底反射镜的发展趋势。介绍了常用的碳化硅材料,分析了它们的性质。给出了几种常用的碳化硅镜坯制备工艺,包括成型、改性和不同的抛光技术。通过对国内现有加工工艺和改性技术的分析,总结出了适应我国的表面改性碳化硅反射镜加工的发展方向。
On the basis of the applications of surface modified silicon carbine mirrors in space optical systems , this paper summarizes the research status and developing trends of this kinds of mirrors at home and abroad .It introduces the widely used silicon carbide materials and their different properties , then gives several kinds of preparation technics of the silicon carbide mirror blanks , such as moulding , modification and different polis-hing methods .Based on the analysis of manufacture and modification process , a way to improve the manufac-ture technology of silicon carbide mirrors in China is summed up .
出处
《中国光学》
EI
CAS
2013年第6期824-833,共10页
Chinese Optics
基金
国家高技术研究发展计划(863计划)资助项目
关键词
光学加工
碳化硅
碳化硅反射镜
表面改性
optical manufacture
silicon cabide
silicon cabide mirror
surface modification
