期刊文献+

ΣΔ微加速度计中基于脉宽调制的力反馈回路 被引量:2

Digital-Analog Converter Based on Pulse Width Modulated Force Feedback in Sigma-Delta Accelerometer
下载PDF
导出
摘要 针对微加速度计接口电路的Sigma-Delta(ΣΔ)数字反馈系统,提出了一种基于脉宽调制(PWM)的力反馈回路:利用模拟低通滤波器将PWM波解调成模拟输出信号,具有滤波和数模转换功能。首先建立微加速度计ΣΔ闭环反馈系统的Simulink模型并进行了系统级仿真。之后采用Filter Solutions滤波器设计软件确定三阶低通巴特沃斯滤波器,并采用Pspice仿真软件进行电路级仿真。最后将制作的PCB版电路进行测试:PWM波通过力反馈回路能还原成高保真度的模拟信号,输出信号和输入信号的频率相对误差小于0.36%,等效DAC分辨率为8 bit。试验表明,此方案结构简单、成本低,能以较低电路复杂度实现高精度的模拟信号输出。 Aiming at the Sigma-Delta( ∑△)digital force feedback system in Mcro-accelerometer interface circuit, this paper presents a force feedback loop based on Pulse Width Modulator (PWM). The PWM wave can be translated into output analog singal using low pass filter,indicating that this circuit has a dual function of filter and digital to analog conversion (DAC). Firstly, ∑△ closed loop feedback system was simulated in Simulink model for system level simulation, then Filter Solutions software was used for designing three-order Butterworth low pass filter, and Pspice software was adopted for circuit level simulation. Finally electronic circuit was made by PCB and then tested. Through the force back loop, the wave can be successfully translate to undistorted analog signal, and the maximun relative error is below 0.36% compared to the input signal,the equivalent DAC resolution is 8 bit. This experiment shows that this method has the advantages of simple structure, low cost, and easy way to produce high precise output analog signal.
出处 《传感技术学报》 CAS CSCD 北大核心 2013年第12期1704-1709,共6页 Chinese Journal of Sensors and Actuators
基金 国家科技重大专项项目(2008ZX05008)
关键词 微加速度计 接口电路 ∑△ 数模转换器 脉宽调制 micro-accelerometer sigma-delta digital to analog converter pulse width modulator
  • 相关文献

参考文献6

二级参考文献30

  • 1龙善丽,茆邦琴,吴建辉,张耀忠,丁家平.∑△DAC中插值滤波器的设计[J].电路与系统学报,2006,11(1):20-23. 被引量:1
  • 2Texas Instruments.True Digital Audio Amplifier TAS5001 Digital Audio PWM Processor[Z].2008.
  • 3Linear Technology, LTC1426 Micropower Dual 6-Bit PWM DAC [Z].1997.
  • 4梅晓蓉.自动控制原理(第二版)[M].北京:科学出版社,2007.
  • 5秦继荣 沈安俊.现代直流伺服控制技术及其系统设计[M].北京:机械工业出版社,1999..
  • 6Bernhard E. BOSER. Capacitive Interfaces for Monolithic Integrated Sensors [C]//RF Analog-to-Digital Converters; Sensor and Actuator Interfaces; Low-Noise Oscillators, PLLs and Synthesizers. R. J. van de Plassche, J. H. Huijsing, and W.M. C. Sansen (eds.), Kluwer Academic Publishers, November 1997: 5-7.
  • 7Yazdi N, Ayazi F, Najafi K. Micromachined Inertial Sensors[J]. Proceedings of the IEEE, Aug. 1998,86:1640-1659.
  • 8Gardner Julian W, Varadan Vijay K, Awadelkarim Osama O.Microsensors, MEMS, and Smart Devices[M].北京:清华大学出版社,2004:2-8.
  • 9Senturia Stephen D微系统设计[M].北京:电子工业出版社,2004.
  • 10Analog Device. ADXL50. DataSheet. USA: Analog Device[R]. 1996.

共引文献24

同被引文献21

  • 1王恒升,王伟,徐泽华.基于PWM的振动测试系统设计[J].自动化仪表,2004,25(6):37-40. 被引量:2
  • 2李旭,谢运祥.PWM技术实现方法综述[J].电源技术应用,2005,8(2):51-55. 被引量:34
  • 3吴学忠,肖定邦,李圣怡.电容式微加速度计的闭环检测技术研究[J].传感技术学报,2006,19(4):1097-1099. 被引量:11
  • 4董景新,赵常德,曹志锦,等.微惯性仪表[M].北京:清华大学出版社,2003.167—168.
  • 5Kempi, Volker. Inertial MEMS: Principles and Practices [ M ].Cambridge University Press,2011 : 131 - 156.
  • 6Wu Jicingfeng. Sensing and Control Electronics for Low-Mass Low-Capacitance MEMS Accelerometers [ D ]. Department of Electricaland Computer Engineering, Carnegie Mellon University, Spring2002:26-30,55-59.
  • 7Mikail Yiiceta§,Mika Pulkkinen,Antti Kalanti,et al. A High-Res-olution Accelerometer With Electrostatic Damping and ImprovedSupply Sensitivity [ J]. IEEE Journal of Solid-State Circuits,2012,47(7) :1721-1730.
  • 8Lung ,Tiflcrt K_ A Low Noise A<*celeroineter with Digital PID-Tvpr Ginm’lld ami Mulliltti Kon <* Fet-dbai-k[ C]//IEEE Interna-lioiuil Solid-Slate Circuits Confcrrnoef ISS() ,1999:250-253.
  • 9Ye Zhemhua, Vang Haigang, Liu Kei, et al. Electro Mechanical.s?hI- witli Migh- Capaitive Micro-Accelerometers andI>ulse Wi<llh Modulation Force FeedljiU'k[ C]//Proceedings of thePrime Asia, 2011, Macao, 2011 :49-52.
  • 10林伟俊,胡世昌,郑旭东,王昊,金仲和.电容式加速度计的数字化处理电路及其与模拟电路的比较[J].传感技术学报,2009,22(11):1562-1567. 被引量:5

引证文献2

二级引证文献13

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部