摘要
该文从人工引晶工艺流程入手,结合提拉法单晶炉已有技术和温度测控技术,使用计算机编程技术和传感器测量技术完成人工引晶的各项步骤,实现了提拉法单晶炉引晶技术的全自动化,从而实现真正意义上的全自动单晶炉。
Based on the process flow of manual seeding,and combining with the available crystal grower technique and temperature control technique,the full-automation of the seeding technique with Czochralski crystal grower has been realized by using the computer programming and the sensor measuring technology to carry out the every procedure of the manual seeding.Thus the full-auto crystal grower has been realized.
出处
《压电与声光》
CSCD
北大核心
2014年第1期97-99,共3页
Piezoelectrics & Acoustooptics
关键词
提拉法单晶炉
引晶
提拉法(CZ)
红外测温
上称重
Czochralski crystal grower
seeding
CZ method
IR temperature measurement
Up-weighing
