摘要
介绍了半导体激光器电极的蒸发技术。改进了焊接技术即蒸铟技术，并对使用的铟量、铟的厚度、蒸发电流、蒸发源与被蒸镀的电极之间的距离及铟表面的均匀度进行了实验。最后蒸发出了表面均匀、有金属光泽、厚度合适的理想电极。
An evaporation technique of making electrodes of semiconductor lasers is presented in this paper. Some important experiments such as the amount of indium, the thickness, evaporation current, the distance between source and electrodes being evaporated, and homogeneity of In surface have been repeatedly done. Finally the ideal electrodes with homogeneous and brilliant surface, and appropriate thickness have been evaporated.
出处
《半导体技术》
CAS
CSCD
北大核心
2001年第2期54-55,共2页
Semiconductor Technology
基金
863项目![863-307-03-01(06)]
