摘要
采用MEVVA源引出的Cr离子对聚酯 (PET)薄膜进行了离子注入 ,引出的Cr离子具有多种电荷态 ,多种能量的Cr离子同时注入 ,其射程分布与单能离子注入的射程分布有明显的差别 .借助于TRIM计算程序 ,采用多次叠加法得出了合理的计算结果 .计算结果表明 ,由于多电荷叠加注入 ,Cr原子浓度分布出现 3层结构 .用背散射 (RBS)方法分析了Cr离子在PET中的剖面分布 .所测量的Cr原子浓度分布形态与计算结果相近 ,但是所测量的分布比计算结果分布范围窄 ,相应位置上的原子浓度低 ,说明溅射效应对Cr原子浓度分布和注入到基体中的注量有明显的影响 .计算结果与样品横截面电子显微镜观察相符合 .
Polyethylene terephthalate (PET) is modified by multi charged Cr ion implantation with a dose ranging from 1×10 16 to 2×10 17 cm -2 using a metal vapor vacuum arc (MEVVA) source. The profile of ion implanted PET is calculated using TRIM program. The profile of Cr ions is obtained by RBS. The experimental results are compared with the calculated value. The results show that the profiles consist of three layers with different Cr concentration. The Cr concentration is lower than that of the calculated value and measured profile is narrower when compared with calculated one. Sputtering influence is obvious for high dose implantation. The structure of the specimen is observed with TEM. The electrical properties of PET are greatly improved after metal ion implantation.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
北大核心
2000年第6期765-768,共4页
Journal of Beijing Normal University(Natural Science)
基金
国家自然科学基金资助项目!(5 96 710 51)
国家"八六三"计划资助项目
