摘要
对TiN、TiC、TiB2为代表的钛系化合物薄膜的制备方法、力学性能及研究现状做了综述,并对其发展趋势做了展望。
The preparation methods, mechanical properties and research status of such as TiN, TiC and TiB2 Ti-matrix films were overviewed. The developing trend of the films was also prospected.
出处
《热加工工艺》
CSCD
北大核心
2014年第4期12-16,共5页
Hot Working Technology
基金
国家自然科学基金资助项目(51175212)
关键词
钛系化合物
薄膜
力学性能
Ti compound
thin film
mechanical property
