摘要
涡旋真空泵具有结构简单、密封性能好、极限真空高 (≤ 5× 10 - 1 Pa)和不易仿制等优点 ,在国外已广泛应用于半导体和薄膜行业。型线部分是涡旋真空泵设计的关键 ,该文结合工程实际需要对其理论和实际型线进行研究 ,在此基础上 ,分解抽象出型线各部分的几何模型 ,并基于 Auto CAD编制出型线设计的 L ISP程序 ,从而建立型线参数化设计模型。该模型提高了设计效率 。
Dry scroll vacuum pump (DSVP) offers a number of significant advantages, i.e. mechanical simplification, good seal characteristic, lower ultimate pressure (≤5×10 -1 Pa),and as a highly technical product, it is not easy to copy. The product has been widely applied in the fields of semiconductor and thin film overseas.This paper deals with the key part in the design of DSVP - the curve. Both the practical and theoretical curves are fully studied based on the engineering requirements.The geometric models of the curve are abstracted and analyzed,and the LISP program of the curve design is presented by AutoCAD. Thus the parameter design model of the curve is developed, which improves the design efficiency and benefits the product series.
出处
《合肥工业大学学报（自然科学版）》
CAS
CSCD
2001年第1期103-105,共3页
Journal of Hefei University of Technology：Natural Science
关键词
涡旋真空泵
型线理论
参数化设计
模型
dry scroll vacuum pump(DSVP)
theory of the curve
parameter design
