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BiInO_3基压电膜的脉冲激光沉积法制备及其性能

Preparation and properties of BiInO_3-based piezoelectric thin films deposited by pulsed laser deposition
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摘要 以PbTiO3为模板,采用脉冲激光沉积(pulsed laser deposition,PLD)法制备了0.20BiInO3-0.80PbTiO3(20BI-PT)高温压电薄膜.X射线衍射谱显示20BI-PT样品的[100]峰出现了明显的劈裂,表明样品具有更高的四方对称性.场发射扫描电镜照片显示20BI-PT样品中出现了部分[111]取向的三角形晶粒.20BI-PT样品的铁电剩余极化(Pr)为0.28C·m-2,矫顽场(Ec)为12MV·m-1.20BI-PT样品的横向压电系数(e31,f)为(-4.7±0.6)C·m-2.介电温度谱显示20BI-PT样品的居里温度达590℃,且介电峰没有明显的频率依赖性. Using PbTiOa as template, 0.20BilnO3 - 0.80PbTiO3 （20BI - PT） high temperature thin films were deposited by PLD. X-ray diffraction patterns show that the [100] peak splits which indi- cates the higher tetragonality in 20BI - PT samples. FESEM pictures show there are some I-Ill]- oriented grains inlaid in the faceted grains. The remanent polarization （Pr） and coercive field （Ec） of 20BI-PT are ~ 0.28 C- m-2 and--12 MV ~ m-1, respectively. The transverse piezoelectric coefficient （eal.f） of 20BI -PT is （--4.7±0.6）℃ m-2. The temperature dependence of dielectric permittivity of 20BI -PT shows the high Curie temperature of 590 ~C, with weak frequency depend- ence.
作者 唐佳伟 王伟 陈小兵
机构地区 扬州大学物理科学与技术学院
出处 《扬州大学学报（自然科学版）》 CAS 北大核心 2014年第1期26-29,共4页 Journal of Yangzhou University：Natural Science Edition
基金 国家自然科学基金资助项目(51072177) 江苏省高校自然科学基金资助项目(08KJB140011)
关键词 薄膜 脉冲激光沉积 铁电 压电 thin films pulsed laser deposition ferroelectricity piezoelectricity
分类号 O482.41 [理学—固体物理]
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扬州大学学报（自然科学版）
2014年 第1期

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