摘要
针对部分结构形式的水听器自噪声较高这一现象,以MEMS型水听器为原型进行了结构分析。根据机械-热噪声理论,给出了MEMS型水听器热噪声计算方法和水介质中声压与加速度的转换关系。对水听器噪声参数进行了计算机仿真,得出了影响传感器自噪声的主要因素,给出了自噪声与谐振频率、质量块质量和机械Q值之间的关系。将典型水听器自噪声与海洋环境噪声进行了对比,仿真分析结果表明,工业用加速度传感器不能用于水下声辐射噪声测量任务,用于在辐射噪声测量的MEMS型水听器需要具有40 ng以下的自噪声才能达到系统要求。
In response to some structural forms of hydrophone containing high self-noise, the structure analysis was derived based on the micro electromechanical systems （ MEMS ） sensor .In reference to the mechanical-thermal noise theory , the calculation method for hydrophone thermal noise and the conversion relationship between sound pressure and acceleration in aqueous media were given .The hydrophone noise parameters used for measuring radia-ted noise were simulated , and the main factors influencing the self-noise of the sensor were obtained .The relation-ships between self-noise and resonance frequency , and mass and Q were given .The typical hydrophone self-noise and the environmental noise of the ocean were compared .The simulation results show that the industrial acceleration sensor cannot be used in underwater acoustic radiation noise measurement tasks .The self-noise of MEMS sensors used in radiation noise measurement should be under 40 ng in order to meet the system requirements .
出处
《哈尔滨工程大学学报》
EI
CAS
CSCD
北大核心
2014年第3期285-288,共4页
Journal of Harbin Engineering University
基金
国家自然科学基金资助项目(11401057)
