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Single-component chemically amplified i-line molecular glass photoresist based on calix[4]resorcinarenes 被引量:2

Single-component chemically amplified i-line molecular glass photoresist based on calix[4]resorcinarenes
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摘要 Calix[4]resorcinarene, prepared by the acidcatalyzed condensation of resorcinol and paraldehyde, was used as the core of the molecular glass compound. The hydroxyl groups of calix[4]resorcinarene were partly protected by tert-butoxycarbonyl(t-BOC) and then esterified with 2-diazo-1-naphthoquinone-4-sulfonyl chloride(2,1,4-DNQ-Cl). Upon irradiation to 365 nm light, the 2,1,4-DNQ groups undergo photolysis to generate a small quantity of sulfonic acid other than indene carboxylic acid. The generated sulfonic acid can further catalyze the deprotection of the t-BOC group. So, a new type of single-component chemically amplified i-line positive photoresist can be formed by the molecular glass compounds. The lithographic performance of the resist was evaluated with high resolution and photosensitivity with an i-line stepper. Calix[4]resorcinarene, prepared by the acid- catalyzed condensation of resorcinol and paraldehyde, was used as the core of the molecular glass compound. The hydroxyl groups of calix[4]resorcinarene were partly pro- tected by tert-butoxycarbonyl (t-BOC) and then esterified with 2-diazo-l-naphthoquinone-4-sulfonyl chloride (2,1,4- DNQ-C1). Upon irradiation to 365 nm light, the 2,1,4-DNQ groups undergo photolysis to generate a small quantity of sulfonic acid other than indene carboxylic acid. The gen- erated sulfonic acid can further catalyze the deprotection of the t-BOC group. So, a new type of single-component chemically amplified i-line positive photoresist can be formed by the molecular glass compounds. The litho- graphic performance of the resist was evaluated with high resolution and photosensitivity with an i-line stepper.
出处 《Chinese Science Bulletin》 SCIE EI CAS 2014年第11期1097-1103,共7页
基金 supported by National Science and Technology Major Projects(2010ZX02303) the Fundamental Research Funds for the Central Universities
关键词 化学增幅 杯芳烃 单组分 光致抗蚀剂 玻璃 分子 正性光刻胶 间苯二酚 Photolithography ; Chemicallyamplified ; Molecular glass ; Photoresist ; i-linePositive
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