摘要
利用扫描电镜、X射线衍射和电子背散射衍射研究了CVD自支撑金刚石薄膜的表面形貌组织、织构和晶界分布。研究表明:金刚石薄膜制备气氛纯度较低,造成薄膜中存在较多孪晶。沉积气体中甲烷浓度升高,孪晶发生频率增加,孪晶对织构组分的影响程度增加。高频率孪晶使薄膜中{100}织构转变为{122}织构,但没有观察到明显的{511}和{411}孪晶织构,说明孪晶取向的变化具有一定的选择性。
The surface morphology, texture and grain boundary distribution of CVD free-standing diamond film were investigated by scanning electron microscopy （SEM）, X-ray diffraction （XRD） and electron backscatter diffraction （EBSD）. It is shown that the preparation atmosphere with lower purity induced a number of twins in diamond film, the frequency of twins increased with the raise of methane concentration, which brought an increased effect on the texture. {100} texture was turned to {122} texture by the high frequency twins, but {511} and {411} textures were not found, indicating that the changed twin orientations were selective to some extent.
出处
《物理测试》
CAS
2014年第1期7-10,共4页
Physics Examination and Testing
基金
河南省高校科技创新团队支持计划资助项目(2012IRTSTHN008)
河南科技大学博士科研启动基金(09001233)资助项目
河南科技大学SRTP资助项目(2012036)
