摘要
针对基于光弹效应的集成光学微腔悬臂梁式加速度计难以同时实现高灵敏度和高抗冲击性的问题,提出增加光学微腔周长的方案。经过详细的理论分析得出:通过增加微腔周长可以有效地增加惯性力下微腔谐振点波长偏移量,提高探测灵敏度。设计了多回路长直跑道型微腔结构,在100μm×600μm悬臂梁区域内集成出周长达5297μm的硅微谐振腔。利用MEMS工艺制作出所设计的微腔结构,测试品质因数达105。该结构应用于加速度等传感器中,在不减小传感器抗冲击性和量程的前提下,能有效提高探测灵敏度。
Aiming at problem that in integrated optics micro cavity cantilever beam type accelerometer based on photoelastic effect is difficult to achieve high sensitivity and high impact resistance at the same time ,a scheme to increase perimeter of optical micro cavity is proposed. It is derived through detailed theoretical analysis, that by increasing perimeter of micro cavity, can effectively increase micro cavity resonance point wavelength offset under inertia force, improve detection sensitivity. Muhi-loop length straight racetrack type micro cavity structure is designed, which integrates silicon micro-resonator with 5 297 μm perimeter in 100μm×600 μm cantilever beam area. The silicon micro-resonator structure is fabricated by micro-electro-mechanical-system （MEMS） technology, and its quality factor is 105 by test. The structure can be used in acceleration sensor, which can effectively improve detection sensitivity without reducing impact resistance of sensor and range.
出处
《传感器与微系统》
CSCD
北大核心
2014年第5期62-65,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(91123036
61178058
61275166)
关键词
集成光学
加速度计
光学谐振腔
光弹效应
integrated optics
accelerometer
optical resonator
photoelastic effect
