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离子注入技术在高效晶硅太阳电池中的应用 被引量:5

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摘要 离子注入技术作为半导体领域中一项重要的掺杂工艺,将其应用到太阳电池中,可大幅提高电池转换效率。本文从工艺原理、工艺实现、关键技术难点、产业化情况等方面分析了离子注入技术。包括IBC电池在内,离子注入技术在未来高效晶硅电池中将扮演重要角色。
出处 《太阳能》 2014年第5期18-20,25,共4页 Solar Energy
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