摘要
采用电感耦合原理,在大气压条件下激发气体产生等离子体,通过等离子体中的活性粒子与材料表面原子发生化学反应,生成易挥发的气体,实现熔石英的稳定去除。大气等离子体抛光熔石英的去除函数为高斯型,在一定参数下,去除函数的形状与等离子体炬到工件表面的靶距有关,靶距越近,等离子体中的活性粒子数越多,材料去除率越高,反应在加工轨迹上就是去除深度越大,半峰全值越大。
The theory of induction coupling was used in atmospheric pressure toexcitated reactive gas achieve plasma gas. The chemical reaction was produced by the activeparticle in plasma with the atoms in material surface to create gaseousstuff, and then quartz is removed. The removal function of induction coupling of atmosphere plasma from Guass function. In any determinated parameters, the shape of the removal function have relationship with the distance between spout and workpiece. If the spout and workpiece are more closer, the number of reactive atoms are larger in the plasma. The machiningtrack are more deeper and the full width at half maximun are more larger.
出处
《航空精密制造技术》
2014年第3期1-4,共4页
Aviation Precision Manufacturing Technology
基金
国家973项目(2011CB013200)资助项目
