摘要
MEMS技术作为一种新兴的高端制造技术受到全球的重视,成为研究热点。随着TiAl合金薄膜的研究和应用发展,其优异的高温力学性能和抗腐蚀性能提高了MEMS系统的应用范围。阐述了TiAl合金薄膜的制备技术,生长模式和微观结构,并介绍了TiAl合金薄膜在MEMS上的应用研究进展。
As a rising advanced manufacturing technology,MEMS（Micro Electromechanical System） is making great sense,and becoming a research hotspot Along with the development of research of TiAl alloy thin film,the application performance of MEMS is greatly raised,owing to the outstanding high temperature property and resistance to corrosion from TiAl alloy thin film.The preparative technique,growth pattern and micro-structure of TiAl thin film are summarized.The application of TiAl alloy thin film in the MEMS field is also introduced.
出处
《金属功能材料》
CAS
2014年第3期44-48,共5页
Metallic Functional Materials
基金
国家自然科学基金(No.51071109)资助项目
