摘要
在强调表面三维形貌测量重要性的基础上 ,介绍了利用扫描白光干涉法测量表面三维微观形貌的原理及三维轮廓仪测量系统的构成。通过给出的几个测量实例 ,反映了该三维轮廓仪的主要特点 ,适合于大范围、高精度、阶梯面的测量。最后分析了影响其测量精度的主要因素。
On the base of emphasizing the importance of surface 3D topography measurement, this paper introduces the principle of scanning white light interferometry method and presents the constitution of surface 3D profiler's measuring system Next, several measuring examples are presented to explain the main characteristics of the profiler, namely, adapting to the measurement of large scale, high precision and discontinuous surface Finally, the main factors which influence the precision are analyzed
出处
《光学技术》
CAS
CSCD
2001年第2期150-152,155,共4页
Optical Technique
关键词
表面三维微观形貌测量
白光干涉
扫描白光干涉法
三维轮廓仪
surface 3D micro topography measurement
white light interference
scanning white light interferometry
3D profiler
