摘要
论述采用激光干涉原理自动调焦的方法。被调焦的光学系统视为双光束干涉光路的一部分,从干涉条纹中取得光学系统的调焦信息,通过由CCD光电器件、微机、步进电机组成的光电系统对离焦量进行检测和补偿实现自动调焦。这种方法与已有的相关法和对比度法相比,调焦精度高,易于实现,有较高的实用性。
Optical automatic focussing based on laser light wave interference is described in this paper. The procedure is as follows: to transform the optical system into a part of an interference optical system. The focussing information can be retrieved from interferograms, the out of focussing information can be detected and compensated with the optical-electronic system consisting of CCD, a microcomputcr and steppermotor. The method is different from the exsisting ones such as correllation method and contrast-response characteristic. The focussing accuracy is high, easy to put into practice and has potential applications.
出处
《天津大学学报》
EI
CAS
CSCD
1993年第2期43-49,共7页
Journal of Tianjin University(Science and Technology)
关键词
激光干涉
干涉图
自动调焦
laser wave interference, interferograms, automatic focussing
