摘要
对目前到 2 0 0 5年的微机电系统的技术和市场发展做了初步的预测 ,详细讨论了可能的市场领域及其对微机械技术发展的要求。认为 2 0 0 5年后 。
The development of the technology and the market of MEMS from now to 2005 are introduced in this paper.The possibility of the market area as well as the request of the development of MEMS are also discussed.It seems that China will have a big market request after 2005.
出处
《半导体情报》
2001年第2期12-14,共3页
Semiconductor Information
