摘要
真空镀膜技术，目前在国内已经广泛地应用，但是，真空镀膜设备存在着气密性差 的问题。本文论述了真空镀膜设备气密性的特点、氦质谱仪检漏特点及其检漏系统，说 明氦质谱仪检漏是检查真空镀膜设备漏气的最有效的方法。文中还介绍了一检漏实例。
At present, the technique of vacuum coating has been widely used in our country. But the airtightness of the vacuum coating equipment is poor. In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described. The leak detection with the Helium mass-spectrometer is the best effect method for checking the leak of vacuum coating equipment, an actual example is also given.
出处
《真空》
CAS
北大核心
1990年第1期44-48,共5页
Vacuum
