摘要
本文从硅晶体的结构说明V型槽形成的机理,该槽具有结晶学的平直、光滑、定位可控制在光刻精度的优点,经合理的方法较成功地实现了V型槽的制备,为光纤-波导的耦合提供较理想、稳定、低耗的器件。
In this paper, the principle of V-groove formation from the structures of silicon is presented. There are advantages of crystallographic flatness, smoothness and orientation of controlable photolithographic accuration of the groove. The successful fabrication of V-groove from reasonable ways can provide an ideal, stable and low-loss device for fiber-to-waveguide couplers.
