摘要
为了经济地考验空间电离层等离子体对处于其中的飞行器表面的作用 ,需要在地面建立等离子体环境模拟器。本文就是为空间电离层环境模拟器研制的扩散型极低气压、低电子温度和极低密度的紧凑型电子回旋共振等离子体源的研制。结果显示 :在等离子体源下游 5 0cm处 ,在 10 -2 ～ 10 -3 Pa范围内获得了电子温度低于 5eV ,密度在 10 4 ～ 10 6cm-3 范围内的较为均匀的等离子体束流 。
A plasma environmental simulator built on land is needed to economically evaluate the plasma facing materials to be used in a satellite travelling in ionosphere environment.A compact ECR plasma source,the strengths of which are its ultra low electron temperature,its low pressure and its ultra low density,was developed and built for such a simulator.The measured results show that fairly uniform plasma beams with the electron temperature T e lower than 5 eV,and the plasma densities, n e about 10 4～ 10 6 cm -3 ,can be obtained 50 cm away from the source in pressures ranging from 10 -2 ～10 -3 Pa.The source can meet all the requirements of the simulator.
出处
《真空科学与技术》
CSCD
北大核心
2001年第3期226-228,共3页
Vacuum Science and Technology
